Wide Range Vacuum Gauges
MPG40x Inverted Magnetron / Pirani Gauge – ATM to Ultra High Vacuum

Combination gauge ? Inverted Magnetron & Pirani
Wide measurement range from 5 x 10-9 mbar to atmosphere
No filament to burn out
Excellent ignition properties
Easy to clean
FPM or metal-sealed feedthrough
LED indicator for high voltage on
Logarithmic analog output signal
Typical Applications
High vacuum pressure monitoring
Base pressure for evaporation and sputtering systems
General vacuum measurement and control in the medium and high vacuum range


The INFICON Inverted Magnetron Pirani Gauges, MPG400 and MPG401, measure from 5 x 10-9 mbar toatmosphere (3.8 x 10-9 Torr to atmosphere). Combining technologies into one single compact unit withone logarithmic analog out put signal significantly reduces the complexity of installation, setup andintegration.