Benefits
Extremely wide measurement range from 5?10-10 mbar to atmosphere (3.8?10-10 Torr to atmosphere)
Excellent repeatability in the process pressure range from 10-8 ? 10-2 mbar of 5%
Pirani interlock protects the filament from premature burnout
Two long-life yttrium oxide coated iridium filaments
Optional graphic display and Fieldbus interfaces available
Automatic high vacuum Pirani adjustment reduces operator interventions
Easy to exchange sensing element with on-board calibration data guarantees high reproducibility
RoHS compliance
Typical Applications
Pressure measurement in semiconductor process and transfer chambers
Industrial coating
General vacuum measurement and control in the low to ultra high vacuum range
Description
The INFICON Bayard-Alpert Pirani Combination Gauge, BPG400, functions as two gauges in a single compact unit measuring from 5?10-10 mbar to atmosphere (3.8?10-10 Torr to atmosphere). Combining technologies reduces the complexity of installation, setup, and integration. Choose the BPG400 for affordable and repeatable process to base pressure measurements in one economic package.
