Pirani Gauges
PCG55x Pirani Capacitance Gauge

Benefits
Gas type independent above 10 mbar ? allows safe venting with any gas mixture
High accuracy and reproducibility at atmosphere ? for reliable, fast atmospheric pressure detection
Versatile of mounting orientation ? provides engineering freedom in tool design
Available with Tungsten (PCG550) or Nickel (PCG552) filament or with a fully ceramic coated (PCG554) sensor unit for highly corrosive applications
Easy to exchange plug & play sensor element with on-board calibration data ? guarantees high reproducibility and low cost of ownership
Selectable output signal for easy integration
Optional atmospheric switch, display and digital interfaces
Compliance & standards: CE, EN, UL, CSA, RoHS
Typical Applications
Load Lock control
Fore vacuum pressure measurement
Safety circuits in vacuum systems
General vacuum measurement and control in the medium and rough vacuum range

Description

The INFICON Pirani Capacitance Diaphragm Gauge (PCG55x) combines the INFICON Pirani technology with the advantages of a ceramic capacitance diaphragm sensor in a single product.

In the measurement range between 10 mbar and atmosphere the capacitance diaphragm technology provides gas-type independent, highly accurate values for reliable pressure measurement. The PCG55x offers also a variety of features which allows the right product configuration for the demanded application.