High & Ultra High Vacuum Gauges
PEG100 Penning Gauge

Wide measurement range from 1 x 10-9 to 1 x 10-2 mbar (7.5 x 10-10 to 7.5 x 10-3 Torr)
All-metal cold cathode sensor (Penning) with ceramic feedthrough
Innovative electrode geometry provides excellent ignition properties
Decreased high voltage after plasma ignition and titanium cathode plates reduce risk of contamination, even during sputtering operations with argon
The anode ring and the titanium cathode can be cleaned or replaced easily
Minimal magnetic field intensity adjacent to gauge
LED indicator for power on and plasma ignited
Logarithmic analog output signal
Fieldbus interface (Profibus DB, DeviceNet) for easy integration into vacuum systems using network communications
Typical Applications
High vacuum pressure monitoring
Evaporation and sputtering systems
General vacuum measurement and control in the fine and high vacuum range


The INFICON Penning Gauge PEG100 provides reliable high vacuum measurements. The rugged penning cold cathode sensor has no filament to burn out. Due to titanium cathode plates and the reduced high voltage after plasma ignition, the gauge can be operated also in sputtering applications. The fieldbus options, in addition to the logarithmic analog output signal, allow easy integration into vacuum systems using Profibus DP or DeviceNet protocols.