High & Ultra High Vacuum Gauges
BAG402 Medium to Ultra High Vacuum Hot Ion Gauge

Measurement range from 5?10-10 mbar to 2.7?10-2 mbar (3.75?10-10 Torr to 5?10-2 Torr)
Excellent repeatability in the process pressure range from 10-8 ? 10-2 mbar of 5%
Overpressure detection protects the filament from premature burnout
Two long-life yttrium oxide coated iridium filaments
Automatic emission current selection reduces control complexity
Easy to exchange sensing element with on-board calibration data guarantees high reproducibility
RoHS compliance
Typical Applications
Pressure measurement in semiconductor process and transfer chambers
Industrial coating
General vacuum measurement and control in the low to ultra high vacuum range


The INFICON single Bayard-Alpert Hot Ion Gauge BAG402 covers a wide measurement range from 5×10-10 mbar to 2.7×10-2 mbar (3.75×10-10 Torr to 5×10-2 Torr). Choose the INFICON BAG402 for affordable and repeatable process to base pressure measurements in a compact active gauge package. The unique, supported dual filaments offer superior accuracy, long term stability and longevity.