Mass Flow Measurement and Control
HFM-D-301/5A flow meter / HFC-D-303/7A flow controller

– +/- (0.5% of reading + 0.2% of Full Scale)
– Proven Reliability
– Range 5 sccm to 10,000 slm(N2 Equivalent)
– Built in Totalizer
– Automatic Zeroing

Applications and Industries
– Leak Testing
– Thin Film Deposition
– High Purity Gas Delivery
– Thermal Flame Spray
– Gas Blending
– Pharmaceutical Process


30x-D-Series mass flow instruments have flow ranges from 0-25 slpm to 0-1000 slm; provide analog and digital outputs, and are constructed of stainless steel.

The Hastings 30x-D offer many enhanced features such as self diagnostics of the sensor and valve, auto zero feature, multi range and gas calibration storage, simple communications with control/logging software and totaliser.

– (0.5% of reading + 0.2% of full scale) Accuracy for <3,000 slm