Features
– +/- (0.5% of reading + 0.2% of Full Scale)
– Proven Reliability
– Range 5 sccm to 10,000 slm(N2 Equivalent)
– Built in Totalizer
– Automatic Zeroing
Applications
– University Research
– Leak Testing
– Vapor Deposition
– Pharmaceutical Processes
– R&D And Process Flows
– Semiconductor Processes
– Gas Blending
– Thermal Flame Spray
Description
30x-D-Series mass flow instruments have flow ranges from 0-5 sccm to 0-10,000 slm; use all metal seals on certain models, provide analog and digital outputs, and are constructed of stainless steel.
The Hastings 30x-D offer many enhanced features such as self diagnostics of the sensor and valve, auto zero feature, multi range and gas calibration storage, simple communications with control/logging software and totaliser.
± (0.5% of reading + 0.2% of full scale) Accuracy for <3,000 slm
| HFM-D-300A Meter | HFC-D-302A Controller | |
| Range | 0 – 5 sccm to 0 – 25 slm (N2) | 0 – 5 sccm to 0 – 25 slm (N2) |
| Accuracy | + (0.5% of reading + 0.2% of full scale) | + (0.5% of reading + 0.2% of full scale) |
| Repeatability | + 0.15% of F.S. | + 0.15% of F.S. |
| Maximum Working Pressure | 500 PSIG (Optional 1000 PSIG) | 500 PSIG (Optional 1000 PSIG) |
| Settling Time | Typically <1 seconds | Typically <1 – 2 seconds |
| Analog I/O (Standard) | 0 – 5 VDC | 0 – 5 VDC |
| Analog I/O (Optional) | 0 – 10 VDC, 0 – 20 mA, 4 – 20 mA | 0 – 10 VDC, 0 – 20 mA, 4 – 20 mA |
| Digital I/O (Standard) | RS-232, RS-485 | RS-232, RS-485 |
| Analog Connector | 15-pin subminiature D | 15-pin subminiature D |
| Digital Connector | Dual RJ-12 | Dual RJ-12 |
| Power Requirements | 11 – 36 VDC @ 3.1 Watt (max), Unipolar or Bipolar (e.g. +15 VDC, +12 VDC) | 11 – 36 VDC @ 6.7 Watt (max), Unipolar or Bipolar (e.g. +15 VDC, +12 VDC) |
| Wetted Materials | 316L SS, Nickel 200, 304 SS, 302 SS | 316L SS, Nickel 200, 302 SS, 304 SS, Kalrez® (Valve Seat) |