– Accuracy:
– ±0.75% of Full-Scale for .005 to 10 slm
– ±1.0% of Full-Scale for 10 to 25 slm
– All-Metal Seals
– 4 Ra Finish Available
– Settling Times:
– HFM-300 approx 0.50 sec
– HFC-302 approx 0.75 sec
– Range — 5 to 25,000 sccm (N2 Equivalent)
– Large Diameter Sensor Tube
– Low Wetted Surface Area
– Operating Pressures to 500 psi or higher
Description
The THI Mass Flow 300 Metaline Series meters and controllers are designed to accurately measure mass flow without corrections or compensations for gas pressure and temperature. They are accurate to better than ?0.75% of full-scale for .005 to 10 slm and ?1.0% of full-scale for 10 to 25 slm. THI mass flow instruments do not require any periodic maintenance under normal operating conditions with clean gases. No damage will occur from the use of moderate overpressures (~500 psi) or overflows. Instruments are normally calibrated with the appropriate standard calibration gas (nitrogen), then a gas conversion factor (GCF) is used to adjust the output for the intended gas. Special calibrations for other gases, such as oxygen, helium and argon, are available upon special order.